DSdsV2_2 Weibull_7 J+d5pC8<|%D2 Level Full Factorial DesignDFoliopB  1234567           U `       `    Continuous21210Low  ? ʡ)@     Oscillating21210Low ? ?7 sh|,@     Continuous61210Low ? ?_ |?5,@     Oscillating61210Low ?? ?9 ̌+@     Continuous21220Low ? ? jt+@     Oscillating21220Low ?? ?# (\5+@     Continuous61220Low ?? ?W Dli+@     Oscillating61220Low ??? ? Zd;,@     Continuous21210High ? ? Pn-@      Oscillating21210High ?? ?V .@      Continuous61210High ?? ?+ 5^I B-@      Oscillating61210High ??? ?Y ?5^I,@      Continuous21220High ?? ?< '1+@      Oscillating21220High ??? ?  Cl*@     Continuous61220High ??? ?G +@     Oscillating61220High ???? ? V-r+@     Continuous21210Low  ?T V)@     Oscillating21210Low ? ?C +@     Continuous61210Low ? ? |?5^+@     Oscillating61210Low ?? ?A y&1,-@     Continuous21220Low ? ?8 Cl+@     Oscillating21220Low ?? ?5 zGa*@     Continuous61220Low ?? ? ">+@     Oscillating61220Low ??? ?! v,@     Continuous21210High ? ?] uVN,@     Oscillating21210High ?? ? FԸ,@     Continuous61210High ?? ?  zG+@     Oscillating61210High ??? ?- ++@     Continuous21220High ?? ?" v,@     Oscillating21220High ??? ?' Dl*@     Continuous61220High ??? ?` n+@     Oscillating61220High ???? ? +@      Continuous21210Low  ? J +V+@! !    Oscillating21210Low ? ?^ zG!*@" "    Continuous61210Low ? ?F ET+@# #    Oscillating61210Low ?? ?  5^I ,@$ $    Continuous21220Low ? ?& V--@% %    Oscillating21220Low ?? ?$ p= c+@& &    Continuous61220Low ?? ?M Qk,@' '    Oscillating61220Low ??? ?. Y-@( (    Continuous21210High ? ?B S㥛D,@) )    Oscillating21210High ?? ? E+@* *    Continuous61210High ?? ? ;O,@+ +    Oscillating61210High ??? ?E M,@, ,    Continuous21220High ?? ?N bX9,@- -    Oscillating21220High ??? ?? #~j,@. .    Continuous61220High ??? ? /$-@/ /    Oscillating61220High ???? ?O ~jt-@0 0    Continuous21210Low  ? rh+@1 1    Oscillating21210Low ? ?  K7I*@2 2    Continuous61210Low ? ?J xi-@3 3    Oscillating61210Low ?? ?> ̌+@4 4    Continuous21220Low ? ?( S+@5 5    Oscillating21220Low ?? ?P S㥛,@6 6    Continuous61220Low ?? ? /$,@7 7    Oscillating61220Low ??? ? /$,@8 8    Continuous21210High ? ?S !rh,@9 9    Oscillating21210High ?? ?/ &1,@: :    Continuous61210High ?? ?, ~jt-@; ;    Oscillating61210High ??? ? 5^I -@< <    Continuous21220High ?? ?= B`",@= =    Oscillating21220High ??? ?I (\,@> >    Continuous61220High ??? ?@ -@? ?    Oscillating61220High ???? ?: V--@@ @    Continuous21210Low  ?\  ףp=J,@A A    Oscillating21210Low ? ?D "~j+@B B    Continuous61210Low ? ?X `"۹+@C C    Oscillating61210Low ?? ?H $*@D D    Continuous21220Low ? ?% 7A`,@E E    Oscillating21220Low ?? ?  B`",@F F    Continuous61220Low ?? ? Pn-@G G    Oscillating61220Low ??? ? 7A`P+@H H    Continuous21210High ? ?U --@I I    Oscillating21210High ?? ?[ V--@J J    Continuous61210High ?? ?L Zd;ߏ.@K K    Oscillating61210High ??? ?Z K7A`.@L L    Continuous21220High ?? ?* A`"+@M M    Oscillating21220High ??? ?3 w/+@N N    Continuous61220High ??? ?0 y&1,@O O    Oscillating61220High ???? ?Q 㥛 ,@P P    Continuous21210Low  ?; $,@Q Q    Oscillating21210Low ? ? (\,@R R    Continuous61210Low ? ? X9ȶ*@S S    Oscillating61210Low ?? ?  $*@T T    Continuous21220Low ? ?4 ++@U U    Oscillating21220Low ?? ?R V-r,@V V    Continuous61220Low ?? ? K7,@W W    Oscillating61220Low ??? ?2 -'+@X X    Continuous21210High ? ?6 )\.@Y Y    Oscillating21210High ?? ? J +.@Z Z    Continuous61210High ?? ? d;O.@[ [    Oscillating61210High ??? ? jt-@\ \    Continuous21220High ?? ?) S%.@] ]    Oscillating21220High ??? ?K v+@^ ^    Continuous61220High ??? ?  r,@_ _    Oscillating61220High ???? ?1 V-+@` `  ư>?      @@@@v@v@TahomaDBTahomaDB ????{Gz?{Gz?{Gz??333333?TahomaTahoma|Tahoma|TahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahoma|Z   CB ???d Upper Legend Lower LegendCurrent Upper TitleCurrent Lower TitleCurrent Main TitleCurrent X-Axis TitleCurrent Y-Axis TitleColorColor = Size = X = Y =  Starts at:  Ends at:  Duration: ???*****Z      ? ? ? ?    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Susceptor-Rotation Method Nozzle Position Deposition Temperature Deposition Time   Thickness   I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD                   Block 1    1    Continuous Oscillating 26 @@ LowHigh  Susceptor-Rotation Method Nozzle Position Deposition Temperature Deposition Time`       1 1$9 =5%X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H p p   p@@ p@ p @  p8 @ p@ p p8 8 p@ p p   p8 8 Design   dMbP?_*+%&A Page &P&?'?(?)?"d??` Q_ ThicknessD:Deposition Time C:Deposition Temperature B:Nozzle Position "A:Susceptor-Rotation Method  Block NumberCenter Points Run OrderStandard Order}F}A F}F}B F}F}GF} F                                 ! " # $ % & ' ( ) * + , - . / 0 1 2 3 4 5 6 7 8 9 : ; < = > ? @ A B C D E F G H I J K L M N O P Q R S T U V W X Y Z [ \ ] ^ _ ?8@?? Continuous@@ Lowʡ)@~ ?@K@?? Oscillating@@ Lowsh|,@~ @@W@?? Continuous@@ Low|?5,@~ @@L@?? Oscillating@@ Low̌+@~ @@ @?? Continuous@@ Lowjt+@~ @@A@?? Oscillating@@ Low(\5+@~ @@U@?? Continuous@@ LowDli+@~ @ @9@?? Oscillating@@ LowZd;,@~  @"@=@?? Continuous@@ HighPn-@~ "@ $@U@??  Oscillating @@ High .@~ $@ &@E@??  Continuous @@ High 5^I B-@~ &@ (@@V@??  Oscillating @@ High ?5^I,@~ (@ *@N@??  Continuous @@ High '1+@~ *@ ,@*@??  Oscillating @@ High Cl*@~ ,@.@Q@?? Continuous@@ High+@~ .@0@@?? Oscillating@@ HighV-r+@~ 0@1@U@?? Continuous@@ LowV)@~ 1@2@P@?? Oscillating@@ Low+@~ 2@3@@?? Continuous@@ Low|?5^+@~ 3@4@@P@?? Oscillating@@ Lowy&1,-@~ 4@5@L@?? Continuous@@ LowCl+@~ 5@6@J@?? Oscillating@@ LowzGa*@~ 6@7@3@?? Continuous@@ Low">+@~ 7@8@@@?? Oscillating@@ Lowv,@~ 8@9@@W@?? Continuous@@ HighuVN,@~ 9@:@?@?? Oscillating@@ HighFԸ,@~ :@;@&@?? Continuous@@ HighzG+@~ ;@<@F@?? Oscillating@@ High++@~ <@=@A@?? Continuous@@ Highv,@~ =@>@C@?? Oscillating@@ HighDl*@~ >@?@X@?? Continuous@@ Highn+@~ ?@@@@?? Oscillating@@ High+@~ @@ @@.@??  Continuous @@ Low J +V+@~ @@!A@W@??! Oscillating!@@ !Low!zG!*@~! A@"A@Q@??" Continuous"@@ "Low"ET+@~" A@#B@$@??# Oscillating#@@ #Low#5^I ,@~# B@$B@C@??$ Continuous$@@ $Low$V--@~$ B@%C@B@??% Oscillating%@@ %Low%p= c+@~% C@&C@@S@??& Continuous&@@ &Low&Qk,@~& C@'D@G@??' Oscillating'@@ 'Low'Y-@~' D@(D@P@??( Continuous(@@ (High(S㥛D,@~( D@)E@,@??) Oscillating)@@ )High)E+@~) E@*E@@??* Continuous*@@ *High*;O,@~* E@+F@@Q@??+ Oscillating+@@ +High+M,@~+ F@,F@S@??, Continuous,@@ ,High,bX9,@~, F@-G@O@??- Oscillating-@@ -High-#~j,@~- G@.G@@??. Continuous.@@ .High./$-@~. G@/H@S@??/ Oscillating/@@ /High/~jt-@~/ H@0H@<@??0 Continuous0@@ 0Low0rh+@~0 H@1I@"@??1 Oscillating1@@ 1Low1K7I*@~1 I@2I@R@??2 Continuous2@@ 2Low2xi-@~2 I@3J@O@??3 Oscillating3@@ 3Low3̌+@~3 J@4J@D@??4 Continuous4@@ 4Low4S+@~4 J@5K@T@??5 Oscillating5@@ 5Low5S㥛,@~5 K@6K@4@??6 Continuous6@@ 6Low6/$,@~6 K@7L@2@??7 Oscillating7@@ 7Low7/$,@~7 L@8L@T@??8 Continuous8@@ 8High8!rh,@~8 L@9M@G@??9 Oscillating9@@ 9High9&1,@~9 M@:M@F@??: Continuous:@@ :High:~jt-@~: M@;N@???; Oscillating;@@ ;High;5^I -@~; N@<N@N@??< Continuous<@@ <High<B`",@~< N@=O@@R@??= Oscillating=@@ =High=(\,@~= O@>O@P@??> Continuous>@@ >High>-@~> O@?P@M@??? Oscillating?@@ ?High?V--@~? P@@@P@W@??@ Continuous@@@ @Low@ ףp=J,@~@ @P@AP@Q@??A OscillatingA@@ ALowA"~j+@~A P@BP@V@??B ContinuousB@@ BLowB`"۹+@~B P@CQ@R@??C OscillatingC@@ CLowC$*@~C Q@D@Q@B@??D ContinuousD@@ DLowD7A`,@~D @Q@EQ@@@??E OscillatingE@@ ELowEB`",@~E Q@FQ@>@??F ContinuousF@@ FLowFPn-@~F Q@GR@@??G OscillatingG@@ GLowG7A`P+@~G R@H@R@@U@??H ContinuousH@@ HHighH--@~H @R@IR@V@??I OscillatingI@@ IHighIV--@~I R@JR@S@??J ContinuousJ@@ JHighJZd;ߏ.@~J R@KS@V@??K OscillatingK@@ KHighKK7A`.@~K S@L@S@E@??L ContinuousL@@ LHighLA`"+@~L @S@MS@I@??M OscillatingM@@ MHighMw/+@~M S@NS@H@??N ContinuousN@@ NHighNy&1,@~N S@OT@@T@??O OscillatingO@@ OHighO㥛 ,@~O T@P@T@M@??P ContinuousP@@ PLowP$,@~P @T@QT@0@??Q OscillatingQ@@ QLowQ(\,@~Q T@RT@:@??R ContinuousR@@ RLowRX9ȶ*@~R T@SU@(@??S OscillatingS@@ SLowS$*@~S U@T@U@J@??T ContinuousT@@ TLowT++@~T @U@UU@T@??U OscillatingU@@ ULowUV-r,@~U U@VU@6@??V ContinuousV@@ VLowVK7,@~V U@WV@I@??W OscillatingW@@ WLowW-'+@~W V@X@V@K@??X ContinuousX@@ XHighX)\.@~X @V@YV@;@??Y OscillatingY@@ YHighYJ +.@~Y V@ZV@7@??Z ContinuousZ@@ ZHighZd;O.@~Z V@[W@1@??[ Oscillating[@@ [High[jt-@~[ W@\@W@D@??\ Continuous\@@ \High\S%.@~\ @W@]W@R@??] Oscillating]@@ ]High]v+@~] W@^W@5@??^ Continuous^@@ ^High^ r,@~^ W@_X@ H@ ? ?_! Oscillating_!@!@ _!High_"V-+@~_ X@>dd  =5%X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma1 Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H     8@ 8    (@ 0 8  @  <   @ 0   x@@$x@$x  @$8@ 8 8 8@ 0 8 0@ 0  < 0 @ 0 0 x@@$x@$x  @$ Sheet1   dMbP?_*+%&A Page &P&?'?(?)?"d??,I} F}F}F}F}F@@@@@@@@@ @ @ @ @ @@@@@@@@@@@@@@@@@ @!@"@#@$@%@&@'@(@)@*@+@& ANOVA Table''''''(Source of VariationDegrees of Freedom!Sum of Squares [Partial]Mean Squares [Partial]F RatioP Value Model~.@\(%@?ܵ?镲@H}M? &  A:Susceptor-Rotation Method~?;On?;On?ڊe?Mb?  B:Nozzle Position~?w/?w/?9EGr@-1? #  C:Deposition Temperature~?+ h?+ h?K7A`?_L?  D:Deposition Time~?Ǻ @Ǻ @PnC8@!j>    AB~?_LU?_LU?Ǻv?%u?    AC~?Nё\C?Nё\C?3ı.n?n?   AD~ ? Q? Q?  0*? V/?   BC~ ? '1Z? '1Z?  rh? J4?   BD~ ? JY8? JY8? ڊe? {Pk?   CD~ ? 6@ 6@ lV}(@ -C6J?   ABC~ ? Q|a2? Q|a2? Aǘ? Q?   ABD~??W[??W[?~:?a2U0*?   ACD~?_vO?_vO?48E?镲 q?   BCD~?(\?(\?+ݓ?q= ףp?   ABCD~?a2U0*?a2U0*?0*?!rh?  Residual~T@k 3@ffffff? Pure Error~T@k 3@ffffff?"Total~#W@#;M =@###$% S =oŏ1?R-sq ='9 {? R-sq(adj) =p!F?5Regression Information6666667 )Term*Effect* Coefficient*Standard Error*Low CI*High CI*T Value+P Value, Intercept--R,@-58EGr?-x&1(,@-rh|,@-q@~.$/A:Susceptor-Rotation Method-ףp= ׳-ܵ|У-58EGr?-v-ׁsF?-LJ0Mb?,B:Nozzle Position-Gz?-?-58EGr?-y&1l?-u?->W[?.-1?!/C:Deposition Temperature-ܵ|г-ܵ|У-58EGr?-v-ׁsF?-鷯0_L? ,D:Deposition Time -\(\? -\(\? -58EGr? -47? -B>٬? -ݵ|г@ 1j> !/AB!-_vO~?!-_vOn?!-58EGr?!-?!-/$?!-On?!0%u? "/AC"-Gz"-&†"-58EGr?"-Pn"-46W[?)-Kӿ)0镲 q? */BCD*- h"?*-)\(?*-58EGr?*-Pkw*-`TR'?*-B?*0q= ףp? +2ABCD+3{Gz?+3{Gz?+358EGr?+3&S+3?+3B?+4!rh?>dd  =8X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H Sheet1   dMbP?_*+%&A Page &P&?'?(?)?"d??@}& F>dd&   $@F@.@ ??   ! 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ThicknessDistribution LineThickness(Distribution Line)Distribution LineThickness Y' = Yd?Non-SignificantNon-SignificantNon-SignificanthA Significant Significant Significanto@  rqABABABd?!?ABCDABCDABCDd?O?ABDABDABDd?_j(?ACDACDACDd?&L?BDBDBDd?1;Z?ADADADd?u-?BCBCBCd?d?C:Deposition TemperatureC:Deposition TemperatureC:Deposition Temperatured?籍?A:Susceptor-Rotation MethodA:Susceptor-Rotation MethodA:Susceptor-Rotation Methodd?.b? ACACACd?l#Z/? ABCABCABCd?>(S\? BCDBCDBCDd?S#^? B:Nozzle PositionB:Nozzle PositionB:Nozzle Positiond?? CDCDCDd?)_־ @D:Deposition TimeD:Deposition TimeD:Deposition Timed?,ݳ@Special Pareto Target Pareto TargetThickness Y' = Yd? A?A?Critical ValueCritical ValueCritical ValueThickness Y' = Yd?A?A?@Non-SignificantNon-SignificantNon-SignificanthA Significant Significant Significanto@   ????{Gz?{Gz?{Gz??333333?TahomaTahoma|Tahoma|TahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomatTahoma|Z  @@@@v@v@TahomaDBTahomaDB        #ƚK +  '' & MDCR-O. &MDCR-{  --'' &MDCR-T1;0;-1; &MDCR-F \"Tahoma ww 0w f-!#ReliaSoft DOE++ - www.ReliaSoft.com2 &MDCR-T3;0;0; &MDCR-F &MDCR-S-' &MDCR-T2;0;0; &MDCR-F "Tahoma `ww 0w f- ! 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User Name 6" &MDCR-T6;0;0; &MDCR-F &MDCR-S !CompanyS!6" &MDCR-T6;0;0; &MDCR-F &MDCR-S !8/5/2008Z"6" &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 10:15:55 AM; #6" &MDCR-T6;0;0; &MDCR-F &MDCR-S#6"#& &MDCR-T6;0;0; &MDCR-F &MDCR-}g--"System f !- =X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma1 Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H x@@ x@ x  @ 8@ 8    (@ 0 8  @  <   @ 0       x@@ x@ x  @ 8@ 8 8 8@ 0 8 0@ 0  < 0 @ 0 0   2008-08-04 12:23:54   dMbP?_*+%&A Page &P&?'?(?)?"d???Q} F}F}F}F}F@@@    @@@@@@@@@@@@@ @!@"@#@$@%@&@'@)@*@+@-@.@/@0@1@2@3@4@5@6@7@8@9@:@;@<@=@>@2008-08-04 12:23:54 Alpha: 0.1Transform: Y' = Y+8"All selected terms are alias free.+8"Terms selected to be in the model: Main Effects A, B, C, D 2-Way Interaction AB, AC, AD, BC, BD, CD 3-Way Interaction ABC, ABD, ACD, BCD 4-Way Interaction ABCD1 8(Independent terms included in the model: Main Effects A, B, C, D2-Way InteractionAB, AC, AD, BC, BD, CD3-Way InteractionABC, ABD, ACD, BCD4-Way Interaction ABCD ANOVA TableSource of VariationDegrees of Freedom!Sum of Squares [Partial]Mean Squares [Partial]F RatioP Value Model~.@\(%@?ܵ?镲@H}M? &  A:Susceptor-Rotation Method~?;On?;On?ڊe?Mb?  B:Nozzle Position~?w/?w/?9EGr@-1? #  C:Deposition Temperature~?+ h?+ h?K7A`?_L?  D:Deposition Time~?Ǻ @Ǻ @PnC8@!j>    AB~?_LU?_LU?Ǻv?%u?    AC~?Nё\C?Nё\C?3ı.n?n?    AD~?Q?Q? 0*?V/?    BC~?'1Z?'1Z? rh?J4?    BD~?JY8?JY8?ڊe?{Pk?   CD~?6@6@lV}(@-C6J?   ABC~ ? Q|a2? Q|a2? Aǘ? Q? !  ABD~!?!?W[?!?W[?!~:?!a2U0*? !"  ACD~"?"_vO?"_vO?"48E?"镲 q? "#  BCD~#?#(\?#(\?#+ݓ?#q= ףp? #$  ABCD~$?$a2U0*?$a2U0*?$0*?$!rh? $% Residual~%T@%k 3@%ffffff?%& Pure Error~&T@&k 3@&ffffff?&'"Total~'#W@'#;M =@'###$% )&S =)'oŏ1?*&R-sq =*('9 {?+& R-sq(adj) =+(p!F?-)Regression Information-******+ .,Term.-Effect.- Coefficient.-Standard Error.-Low CI.-High CI.-T Value..P Value// Intercept/0/0R,@/058EGr?/0x&1(,@/0rh|,@/0q@~/1$02A:Susceptor-Rotation Method00ףp= ׳00ܵ|У0058EGr?00v00ׁsF?00LJ03Mb?1/B:Nozzle Position10Gz?10?1058EGr?10y&1l?10u?10>W[?11-1?!22C:Deposition Temperature20ܵ|г20ܵ|У2058EGr?20v20ׁsF?20鷯23_L?3/D:Deposition Time30\(\?30\(\?3058EGr?3047?30B>٬?30ݵ|г@34j> 42AB40_vO~?40_vOn?4058EGr?40?40/$?40On?43%u? 52AC50Gz50&†5058EGr?50Pn5046W[?<0Kӿ<3镲 q? =2BCD=0 h"?=0)\(?=058EGr?=0Pkw=0`TR'?=0B?=3q= ףp? >5ABCD>6{Gz?>6{Gz?>658EGr?>6&S>6?>6B?>7!rh?>dd Optimal Solution DSpreadSheet =FA&8X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma"$"#,##0_);\("$"#,##0\)"$"#,##0_);[Red]\("$"#,##0\) "$"#,##0.00_);\("$"#,##0.00\)%""$"#,##0.00_);[Red]\("$"#,##0.00\)3*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_)*)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_);,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)2+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H  @I@ 8 @I@ 0 @I@ "p AI@ "p AI@   x @x x Sheet1   dMbP?_*+%&APage &P&?'?(?)?"dXX???@}nF}& F} F}$F}mF}& F@   6.Optimal Solutions from the Model for Thickness)!Settings in terms of Actual Value B C DPredicted Thickness Position 6K@ High~-@ Position 2~j@ High~-@( Settings in terms of Coded Value B C D Predicted Thickness~  48E뿽 ?-@~ ? Ps ?-@7/Optimal Solution by Considering the VariabilityRegression Information   TermEffect Coefficient  InterceptQB:Nozzle PositionXX C:Deposition Temperaturey&1y&1( Settings in terms of Coded Value B C DPredicted ThicknessPredicted Thickness Std~48E뿽?-@Q5b?~?Ps?-@4?> dd& d OptimizationDFolio0B  1234567           V `       `    Continuous21210Low  ? ʡ)@     Oscillating21210Low ? ?7 sh|,@     Continuous61210Low ? ?_ |?5,@     Oscillating61210Low ?? ?9 ̌+@     Continuous21220Low ? ? jt+@     Oscillating21220Low ?? ?# (\5+@     Continuous61220Low ?? ?W Dli+@     Oscillating61220Low ??? ? Zd;,@     Continuous21210High ? ? Pn-@      Oscillating21210High ?? ?V .@      Continuous61210High ?? ?+ 5^I B-@      Oscillating61210High ??? ?Y ?5^I,@      Continuous21220High ?? ?< '1+@      Oscillating21220High ??? ?  Cl*@     Continuous61220High ??? ?G +@     Oscillating61220High ???? ? V-r+@     Continuous21210Low  ?T V)@     Oscillating21210Low ? ?C +@     Continuous61210Low ? ? |?5^+@     Oscillating61210Low ?? ?A y&1,-@     Continuous21220Low ? ?8 Cl+@     Oscillating21220Low ?? ?5 zGa*@     Continuous61220Low ?? ? ">+@     Oscillating61220Low ??? ?! v,@     Continuous21210High ? ?] uVN,@     Oscillating21210High ?? ? FԸ,@     Continuous61210High ?? ?  zG+@     Oscillating61210High ??? ?- ++@     Continuous21220High ?? ?" v,@     Oscillating21220High ??? ?' Dl*@     Continuous61220High ??? ?` n+@     Oscillating61220High ???? ? +@      Continuous21210Low  ? J +V+@! !    Oscillating21210Low ? ?^ zG!*@" "    Continuous61210Low ? ?F ET+@# #    Oscillating61210Low ?? ?  5^I ,@$ $    Continuous21220Low ? ?& V--@% %    Oscillating21220Low ?? ?$ p= c+@& &    Continuous61220Low ?? ?M Qk,@' '    Oscillating61220Low ??? ?. Y-@( (    Continuous21210High ? ?B S㥛D,@) )    Oscillating21210High ?? ? E+@* *    Continuous61210High ?? ? ;O,@+ +    Oscillating61210High ??? ?E M,@, ,    Continuous21220High ?? ?N bX9,@- -    Oscillating21220High ??? ?? #~j,@. .    Continuous61220High ??? ? /$-@/ /    Oscillating61220High ???? ?O ~jt-@0 0    Continuous21210Low  ? rh+@1 1    Oscillating21210Low ? ?  K7I*@2 2    Continuous61210Low ? ?J xi-@3 3    Oscillating61210Low ?? ?> ̌+@4 4    Continuous21220Low ? ?( S+@5 5    Oscillating21220Low ?? ?P S㥛,@6 6    Continuous61220Low ?? ? /$,@7 7    Oscillating61220Low ??? ? /$,@8 8    Continuous21210High ? ?S !rh,@9 9    Oscillating21210High ?? ?/ &1,@: :    Continuous61210High ?? ?, ~jt-@; ;    Oscillating61210High ??? ? 5^I -@< <    Continuous21220High ?? ?= B`",@= =    Oscillating21220High ??? ?I (\,@> >    Continuous61220High ??? ?@ -@? ?    Oscillating61220High ???? ?: V--@@ @    Continuous21210Low  ?\  ףp=J,@A A    Oscillating21210Low ? ?D "~j+@B B    Continuous61210Low ? ?X `"۹+@C C    Oscillating61210Low ?? ?H $*@D D    Continuous21220Low ? ?% 7A`,@E E    Oscillating21220Low ?? ?  B`",@F F    Continuous61220Low ?? ? Pn-@G G    Oscillating61220Low ??? ? 7A`P+@H H    Continuous21210High ? ?U --@I I    Oscillating21210High ?? ?[ V--@J J    Continuous61210High ?? ?L Zd;ߏ.@K K    Oscillating61210High ??? ?Z K7A`.@L L    Continuous21220High ?? ?* A`"+@M M    Oscillating21220High ??? ?3 w/+@N N    Continuous61220High ??? ?0 y&1,@O O    Oscillating61220High ???? ?Q 㥛 ,@P P    Continuous21210Low  ?; $,@Q Q    Oscillating21210Low ? ? (\,@R R    Continuous61210Low ? ? X9ȶ*@S S    Oscillating61210Low ?? ?  $*@T T    Continuous21220Low ? ?4 ++@U U    Oscillating21220Low ?? ?R V-r,@V V    Continuous61220Low ?? ? K7,@W W    Oscillating61220Low ??? ?2 -'+@X X    Continuous21210High ? ?6 )\.@Y Y    Oscillating21210High ?? ? J +.@Z Z    Continuous61210High ?? ? d;O.@[ [    Oscillating61210High ??? ? jt-@\ \    Continuous21220High ?? ?) S%.@] ]    Oscillating21220High ??? ?K v+@^ ^    Continuous61220High ??? ?  r,@_ _    Oscillating61220High ???? ?1 V-+@` `    Thickness,@-@.@??  Susceptor-Rotation Method?@P.5  Nozzle Position?@P.5  Deposition Temperature?P.5  Deposition Time?@P.5   Optimal Solution 1 D  -@ -@ Optimal Solution 2 t8   -@ -@ ư>?   Optimal Solution 1 D  -@ -@ @@@@v@v@TahomaDBTahomaDB o_?k)3?{Gz?k)?gj+?ZӼ?o_?Oz1?333333?TahomaTahoma|Tahoma|TahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahoma|Z ' Folio Data SetContinuous FunctionContinuous FunctionContinuous FunctionFactor vs Responsed?' Folio Data SetDiscrete FunctionDiscrete FunctionDiscrete FunctionFactor vs Responsed?' Folio Data Set(A:Susceptor-Rotation Method vs Thickness(A:Susceptor-Rotation Method vs ThicknessDiscrete FunctionFactor vs Responsed?' Folio Data SetB:Nozzle Position vs ThicknessB:Nozzle Position vs ThicknessContinuous FunctionFactor vs Responsed?' Folio Data Set%C:Deposition Temperature vs Thickness%C:Deposition Temperature vs ThicknessDiscrete FunctionFactor vs Responsed?Folio Data Set Factor Value Factor Value Factor Valued ?Folio Data SetResponse ValueResponse ValueResponse Valued ?  cb ?^ ? @ A B C D E F G H I J K L M N O P Q R S T U V W X Y Z [ \ ] ^ _ ?8@?? Continuous@@ Lowʡ)@~ ?@K@?? Oscillating@@ Lowsh|,@~ @@W@?? Continuous@@ Low|?5,@~ @@L@?? Oscillating@@ Low̌+@~ @@ @?? Continuous@@ Lowjt+@~ @@A@?? Oscillating@@ Low(\5+@~ @@U@?? Continuous@@ LowDli+@~ @ @9@?? Oscillating@@ LowZd;,@~  @"@=@?? Continuous@@ HighPn-@~ "@ $@U@??  Oscillating @@ High .@~ $@ &@E@??  Continuous @@ High 5^I B-@~ &@ (@@V@??  Oscillating @@ High ?5^I,@~ (@ *@N@??  Continuous @@ High '1+@~ *@ ,@*@??  Oscillating @@ High Cl*@~ ,@.@Q@?? Continuous@@ High+@~ .@0@@?? Oscillating@@ HighV-r+@~ 0@1@U@?? Continuous@@ LowV)@~ 1@2@P@?? Oscillating@@ Low+@~ 2@3@@?? Continuous@@ Low|?5^+@~ 3@4@@P@?? Oscillating@@ Lowy&1,-@~ 4@5@L@?? Continuous@@ LowCl+@~ 5@6@J@?? Oscillating@@ LowzGa*@~ 6@7@3@?? Continuous@@ Low">+@~ 7@8@@@?? Oscillating@@ Lowv,@~ 8@9@@W@?? Continuous@@ HighuVN,@~ 9@:@?@?? Oscillating@@ HighFԸ,@~ :@;@&@?? Continuous@@ HighzG+@~ ;@<@F@?? Oscillating@@ High++@~ <@=@A@?? Continuous@@ Highv,@~ =@>@C@?? Oscillating@@ HighDl*@~ >@?@X@?? Continuous@@ Highn+@~ ?@@@@?? Oscillating@@ High+@~ @@ @@.@??  Continuous @@ Low J +V+@~ @@!A@W@??! Oscillating!@@ !Low!zG!*@~! A@"A@Q@??" Continuous"@@ "Low"ET+@~" A@#B@$@??# Oscillating#@@ #Low#5^I ,@~# B@$B@C@??$ Continuous$@@ $Low$V--@~$ B@%C@B@??% Oscillating%@@ %Low%p= c+@~% C@&C@@S@??& Continuous&@@ &Low&Qk,@~& C@'D@G@??' Oscillating'@@ 'Low'Y-@~' D@(D@P@??( Continuous(@@ (High(S㥛D,@~( D@)E@,@??) Oscillating)@@ )High)E+@~) E@*E@@??* Continuous*@@ *High*;O,@~* E@+F@@Q@??+ Oscillating+@@ +High+M,@~+ F@,F@S@??, Continuous,@@ ,High,bX9,@~, F@-G@O@??- Oscillating-@@ -High-#~j,@~- G@.G@@??. Continuous.@@ .High./$-@~. G@/H@S@??/ Oscillating/@@ /High/~jt-@~/ H@0H@<@??0 Continuous0@@ 0Low0rh+@~0 H@1I@"@??1 Oscillating1@@ 1Low1K7I*@~1 I@2I@R@??2 Continuous2@@ 2Low2xi-@~2 I@3J@O@??3 Oscillating3@@ 3Low3̌+@~3 J@4J@D@??4 Continuous4@@ 4Low4S+@~4 J@5K@T@??5 Oscillating5@@ 5Low5S㥛,@~5 K@6K@4@??6 Continuous6@@ 6Low6/$,@~6 K@7L@2@??7 Oscillating7@@ 7Low7/$,@~7 L@8L@T@??8 Continuous8@@ 8High8!rh,@~8 L@9M@G@??9 Oscillating9@@ 9High9&1,@~9 M@:M@F@??: Continuous:@@ :High:~jt-@~: M@;N@???; Oscillating;@@ ;High;5^I -@~; N@<N@N@??< Continuous<@@ <High<B`",@~< N@=O@@R@??= Oscillating=@@ =High=(\,@~= O@>O@P@??> Continuous>@@ >High>-@~> O@?P@M@??? Oscillating?@@ ?High?V--@~? P@@@P@W@??@ Continuous@@@ @Low@ ףp=J,@~@ @P@AP@Q@??A OscillatingA@@ ALowA"~j+@~A P@BP@V@??B ContinuousB@@ BLowB`"۹+@~B P@CQ@R@??C OscillatingC@@ CLowC$*@~C Q@D@Q@B@??D ContinuousD@@ DLowD7A`,@~D @Q@EQ@@@??E OscillatingE@@ ELowEB`",@~E Q@FQ@>@??F ContinuousF@@ FLowFPn-@~F Q@GR@@??G OscillatingG@@ GLowG7A`P+@~G R@H@R@@U@??H ContinuousH@@ HHighH--@~H @R@IR@V@??I OscillatingI@@ IHighIV--@~I R@JR@S@??J ContinuousJ@@ JHighJZd;ߏ.@~J R@KS@V@??K OscillatingK@@ KHighKK7A`.@~K S@L@S@E@??L ContinuousL@@ LHighLA`"+@~L @S@MS@I@??M OscillatingM@@ MHighMw/+@~M S@NS@H@??N ContinuousN@@ NHighNy&1,@~N S@OT@@T@??O OscillatingO@@ OHighO㥛 ,@~O T@P@T@M@??P ContinuousP@@ PLowP$,@~P @T@QT@0@??Q OscillatingQ@@ QLowQ(\,@~Q T@RT@:@??R ContinuousR@@ RLowRX9ȶ*@~R T@SU@(@??S OscillatingS@@ SLowS$*@~S U@T@U@J@??T ContinuousT@@ TLowT++@~T @U@UU@T@??U OscillatingU@@ ULowUV-r,@~U U@VU@6@??V ContinuousV@@ VLowVK7,@~V U@WV@I@??W OscillatingW@@ WLowW-'+@~W V@X@V@K@??X ContinuousX@@ XHighX)\.@~X @V@YV@;@??Y OscillatingY@@ YHighYJ +.@~Y V@ZV@7@??Z ContinuousZ@@ ZHighZd;O.@~Z V@[W@1@??[ Oscillating[@@ [High[jt-@~[ W@\@W@D@??\ Continuous\@@ \High\S%.@~\ @W@]W@R@??] Oscillating]@@ ]High]v+@~] W@^W@5@??^ Continuous^@@ ^High^ r,@~^ W@_X@ H@ ? ?_! Oscillating_!@!@ _!High_"V-+@~_ X@>dd  =5%X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma1 Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H     8@ 8    (@ 0  < 8  @   @ 0   x@@$x@$x  @$8@ 8 8 8@ 0 8 0@ 0  < 8 @ 0 8 x@@$x@$x  @$ Sheet1   dMbP?_*+%&A Page &P&?'?(?)?"d??I} F}F}F}F}F@@@@@@@@@ @ @ @ @@@@@@@@@& ANOVA Table''''''(Source of VariationDegrees of Freedom!Sum of Squares [Partial]Mean Squares [Partial]F RatioP Value Model~@h|?"@|гY@vz%@[g+>  B:Nozzle Position~?w/?w/?Cl @ fc]F? #! C:Deposition Temperature~?+ h?+ h?ec]?`"?  D:Deposition Time~?Ǻ @Ǻ @%:@`y>   CD~?6@6@S)@ Mb@? !Residual~V@8m4@??! Lack of Fit~@d]K?{?J{/L??  ! Pure Error~ V@ H3@ 3?  "Total~ #W@ #;M =@ ###$% S = Ș? R-sq = ӅX? R-sq(adj) =,{؜?5Regression Information6666667 )Term*Effect* Coefficient*Standard Error*Low CI*High CI*T Value+P Value, Intercept--R,@-JY?- y),@-z6>W{,@-镲 vr@~.,B:Nozzle Position-Gz?-?-JY?-F%u{?-46W[q@1`y> 2CD3Gzֿ3Gzƿ3JY?3Fx $п3c]Kȷ3}?5^ 4Mb@?>dd  =,G1*X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H p p  p  p  p  Sheet1   dMbP?_*+%&A Page &P&?'?(?)?"d??X High PI Low PI Standard Error High CI Low CI Standard Error High CI Low CIStandard ErrorMean PredictedD:Deposition TimeC:Deposition TemperatureB:Nozzle Position A:Susceptor-Rotation Method Block}F}A F}F}B F}F}F}F} F}F&>dd ƚK 0  '' & MDCR-O. &MDCR-{  --'' &MDCR-T1;0;-1; &MDCR-F \"Tahomab ww @w f-!#ReliaSoft DOE++ - www.ReliaSoft.com2 &MDCR-T3;0;0; &MDCR-F &MDCR-S-' &MDCR-T2;0;0; &MDCR-F "Tahoma ww @w f-!Optimal Solution 1} &MDCR-T3;0;0; &MDCR-F &MDCR-S >"Tahomab ww @w f-!B:Nozzle Position$J &MDCR-T3;0;0; &MDCR-F &MDCR-S !X = 2R% &MDCR-T3;0;0; &MDCR-F &MDCR-S!C:Deposition Temperature$6 &MDCR-T3;0;0; &MDCR-F &MDCR-S ! X = 1210.7392;% &MDCR-T3;0;0; &MDCR-F &MDCR-S!D:Deposition Time$M &MDCR-T3;0;0; &MDCR-F &MDCR-S !X = High% &MDCR-T3;0;0; &MDCR-F &MDCR-S! ' &MDCR-T3;0;0; &MDCR-F &MDCR-S>"Tahoma ww @w f- ! Y = 14.5000i &MDCR-T3;0;0; &MDCR-F &MDCR-S ! (Target)* &MDCR-T3;0;0; &MDCR-F &MDCR-S ! ThicknessX &MDCR-T3;0;0; &MDCR-F &MDCR-S! a &MDCR-T3;0;0; &MDCR-F &MDCR-S-  &MDCR-T4;0;0; &MDCR-F   &MDCR-T4;0;0; &MDCR-F" " &MDCR-T4;0;0; &MDCR-F=  = &MDCR-T4;0;0; &MDCR-F  = &MDCR-T4;0;0; &MDCR-F= &MDCR-T4;0;0; &MDCR-F-!  &MDCR-T4;0;0; &MDCR-F\"Tahomab ww @w f-!2! &MDCR-T5;0;0; &MDCR-F &MDCR-S!"  " &MDCR-T4;0;0; &MDCR-F!6! &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F\"Tahoma ww @w f- !13.716z0 &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F !14.673=0 &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F !13.9070 &MDCR-T5;0;0; &MDCR-F &MDCR-S// &MDCR-T4;0;0; &MDCR-F !14.0990 &MDCR-T5;0;0; &MDCR-F &MDCR-SVV &MDCR-T4;0;0; &MDCR-F !14.2900 &MDCR-T5;0;0; &MDCR-F &MDCR-S} }  &MDCR-T4;0;0; &MDCR-F !14.481 0 &MDCR-T5;0;0; &MDCR-F &MDCR-S!  &MDCR-T4;0;0; &MDCR-F\"Tahomab ww @w f- !1210.000=$ &MDCR-T5;0;0; &MDCR-F &MDCR-S!; ; &MDCR-T4;0;0; &MDCR-F !1220.000=$ &MDCR-T5;0;0; &MDCR-F &MDCR-S!i i &MDCR-T4;0;0; &MDCR-F !1212.000=$" &MDCR-T5;0;0; &MDCR-F &MDCR-S!  &MDCR-T4;0;0; &MDCR-F !1214.000=$ &MDCR-T5;0;0; &MDCR-F &MDCR-S!R R &MDCR-T4;0;0; &MDCR-F !1216.000=$  &MDCR-T5;0;0; &MDCR-F &MDCR-S!  &MDCR-T4;0;0; &MDCR-F !1218.000=$ &MDCR-T5;0;0; &MDCR-F &MDCR-S!   &MDCR-T4;0;0; &MDCR-F!LowD" &MDCR-T5;0;0; &MDCR-F &MDCR-S!T T &MDCR-T4;0;0; &MDCR-F!High"  &MDCR-T5;0;0; &MDCR-F &MDCR-S--5  /&SMDCR-TK8;600002;1;A:Susceptor-Rotation Method vs Thickness X = -1.000 Y = 14.500 &MDCR-FT r .&RMDCR-TJ8;600002;2;A:Susceptor-Rotation Method vs Thickness X = 1.000 Y = 14.673 &MDCR-F0%8 8 Q J  h\  "n   : Q- i?#Qc;&1MDCR-T)8;600003;0;B:Nozzle Position vs Thickness &MDCR-F?-&PMDCR-TH8;600004;1;C:Deposition Temperature vs Thickness X = -1.000 Y = 13.716 &MDCR-F5  "-&OMDCR-TG8;600004;2;C:Deposition Temperature vs Thickness X = 1.000 Y = 14.5006 &MDCR-F- &(MDCR-T 8;509;0;Factor Value X = -1.000 &MDCR-F~ ~&*MDCR-T"8;509;0;Factor Value X = 1210.739 &MDCR-FT T&'MDCR-T8;509;0;Factor Value X = 1.0007 &MDCR-F-  = &*MDCR-T"8;510;0;Response Value Y = 14.500 &MDCR-F\"Tahoma ww @w f- ! Optimization! &MDCR-T6;0;0; &MDCR-F &MDCR-S-!& &MDCR-T6;0;0; &MDCR-F!& &MDCR-T6;0;0; &MDCR-F !Factor vs ResponseI!&MDCR-T 7;600000;0;! &MDCR-F &MDCR-S b!b!&MDCR-T 7;600000;0;! &MDCR-F!Continuous Functiona1"&MDCR-T 7;600000;0;! &MDCR-F &MDCR-SE!7!&MDCR-T 7;600001;0;! &MDCR-F!Discrete Function11"&MDCR-T 7;600001;0;" &MDCR-F &MDCR-S!& &MDCR-T6;0;0; &MDCR-F-v!v! &MDCR-T7;509;0; &MDCR-F ! Factor Value1" &MDCR-T7;509;0; &MDCR-F &MDCR-S-(!(! &MDCR-T7;510;0; &MDCR-F !Response Value1" &MDCR-T7;510;0; &MDCR-F &MDCR-S!My#! &MDCR-T6;0;0; &MDCR-F &MDCR-S !CompanyS! &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 8/14/2008! &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 4:40:08 PM7 ! &MDCR-T6;0;0; &MDCR-F &MDCR-S- ! & &MDCR-T6;0;0; &MDCR-F &MDCR-}P--"System f !-   $@F@.@ ??   ! GF@$@X@?dEffect Probability)User Name Company 8/5/2008 10:15:47 AM#ReliaSoft DOE++ - www.ReliaSoft.com Alpha = 0.1!Normal Probability Plot of EffectStandardized Effect (T Value) ProbabilityColorColor = Size = X = Y =  Starts at:  Ends at:  Duration: ???*****#ReliaSoft DOE++ - www.ReliaSoft.comZ @@@@v@v@TahomaDBTahomaDB o_?_Fj?{Gz?c]Kȵ?gj+?ͪժ?y):?aM?333333?TahomaTahoma|Tahoma|TahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahoma|Z  ThicknessNon-Significant EffectsThickness(Effect Points)Non-Significant EffectsThickness Y' = Yd? ThicknessSignificant EffectsThickness(Effect Points)Significant EffectsThickness Y' = Yd? ThicknessDistribution LineThickness(Distribution Line)Distribution LineThickness Y' = Yd?   ThicknessNon-Significant EffectsThickness(Effect Points)Non-Significant EffectsThickness Y' = Yd?C:Deposition Temperature|@B@ ThicknessSignificant EffectsThickness(Effect Points)Significant EffectsThickness Y' = Yd?CDCDo_R} )@B:Nozzle PositionB:Nozzle Position^Q?@O@D:Deposition TimeD:Deposition Time)tYq@U@ ThicknessDistribution LineThickness(Distribution Line)Distribution LineThickness Y' = Yd?4(\ׅzW>swz> ףp= .4>Gz=i>Qy>(\(lڟ%a>233333 a?< ףp=hQY30?FzG_ƃI?PQB@0fgb?Q}ua y? =?X@C ףp=@)X@933333@񿳳X@/\(@i{X@%Q@A6X@Gz@X@ףp= @"Tahoma) ww 0w fg-!Standardized Effect (T Value)f% &MDCR-T3;0;0; &MDCR-F &MDCR-S>"Tahoma! ww 0w fg- ! Probability} &MDCR-T3;0;0; &MDCR-F &MDCR-S# &MDCR-T4;0;0; &MDCR-F\"Tahoma) ww 0w fg- !-6.000# &MDCR-T5;0;0; &MDCR-F &MDCR-S# &MDCR-T4;0;0; &MDCR-F !6.000R# &MDCR-T5;0;0; &MDCR-F &MDCR-S-# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F#55 &MDCR-T4;0;0; &MDCR-F-#T T &MDCR-T4;0;0; &MDCR-F !-3.600# &MDCR-T5;0;0; &MDCR-F &MDCR-S-#s s &MDCR-T4;0;0; &MDCR-F#  &MDCR-T4;0;0; &MDCR-F#  &MDCR-T4;0;0; &MDCR-F#  &MDCR-T4;0;0; &MDCR-F-# &MDCR-T4;0;0; &MDCR-F !-1.200#. &MDCR-T5;0;0; &MDCR-F &MDCR-S-#   &MDCR-T4;0;0; &MDCR-F#,, &MDCR-T4;0;0; &MDCR-F#KK &MDCR-T4;0;0; &MDCR-F#jj &MDCR-T4;0;0; &MDCR-F-# &MDCR-T4;0;0; &MDCR-F !1.200R# &MDCR-T5;0;0; &MDCR-F &MDCR-S-# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F-### &MDCR-T4;0;0; &MDCR-F !3.600R#{ &MDCR-T5;0;0; &MDCR-F &MDCR-S-#AA &MDCR-T4;0;0; &MDCR-F#`` &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F# &MDCR-T4;0;0; &MDCR-F !10.000X# &MDCR-T5;0;0; &MDCR-F &MDCR-S-## &MDCR-T4;0;0; &MDCR-F- &MDCR-T4;0;0; &MDCR-F &MDCR-T4;0;0; &MDCR-FLL &MDCR-T4;0;0; &MDCR-F !50.000 &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F &MDCR-T4;0;0; &MDCR-F(( &MDCR-T4;0;0; &MDCR-F>> &MDCR-T4;0;0; &MDCR-F4 4  &MDCR-T4;0;0; &MDCR-F !99.0007 &MDCR-T5;0;0; &MDCR-F &MDCR-S- &MDCR-T4;0;0; &MDCR-F- 1&XMDCR-TP8;2;1;Thickness(Effect Points) C:Deposition Temperature X = -0.807 Y = 37.500 &MDCR-F-" W"# &&BMDCR-T:8;1;1;Thickness(Effect Points) CD X = -3.598 Y = 12.500 &MDCR-F!CD! &MDCR-T9;1;1; &MDCR-F &MDCR-S>!-&PMDCR-TH8;1;2;Thickness(Effect Points) B:Nozzle Position X = 1.799 Y = 62.500 &MDCR-F!B:Nozzle PositionBS &MDCR-T9;1;2; &MDCR-F &MDCR-S 6 w-&PMDCR-TH8;1;3;Thickness(Effect Points) D:Deposition Time X = 5.111 Y = 87.500 &MDCR-F!D:Deposition Timeh : &MDCR-T9;1;3; &MDCR-F &MDCR-S-&%#"} `+,Ji\'  6W#)&*MDCR-T"8;3;0;Thickness(Distribution Line) &MDCR-F!Effect Probability &MDCR-T6;0;0; &MDCR-F &MDCR-S- & &MDCR-T6;0;0; &MDCR-F( (& &MDCR-T6;0;0; &MDCR-F  ! ThicknessK &MDCR-T7;2;0; &MDCR-F &MDCR-S !Y' = Y &MDCR-T7;2;0; &MDCR-F &MDCR-S -E! &MDCR-T7;2;0; &MDCR-F!Non-Significant Effects! &MDCR-T7;2;0; &MDCR-F &MDCR-S-! &MDCR-T7;1;0; &MDCR-F!Significant Effectse`! &MDCR-T7;1;0; &MDCR-F &MDCR-S-v vM! &MDCR-T7;3;0; &MDCR-F!Distribution Line! &MDCR-T7;3;0; &MDCR-F &MDCR-S ! User Name &MDCR-T6;0;0; &MDCR-F &MDCR-S !CompanyS! &MDCR-T6;0;0; &MDCR-F &MDCR-S !8/5/2008Z" &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 10:15:47 AM; # &MDCR-T6;0;0; &MDCR-F &MDCR-S-# #& &MDCR-T6;0;0; &MDCR-F &MDCR-}M--"Systemg fg !@- =X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma1 Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H x@@ x@ x  @ 8@ 8    (@ 0  < 8  @   @ 0       x@@ x@ x  @ 8@ 8 8 8@ 0 8 0@ 0  < 8 @ 0 8   2008-08-04 12:23:53   dMbP?_*+%&A Page &P&?'?(?)?"d??&Q} F}F}F}F}F@@@    @@@@@@@@@@@@@@@ @!@"@#@$@%@2008-08-04 12:23:53 Alpha: 0.1Transform: Y' = Y+8"All selected terms are alias free.+8"Terms selected to be in the model: Main EffectsB, C, D 2-Way Interaction CD1 8(Independent terms included in the model:  Main Effects B, C, D 2-Way Interaction CD ANOVA TableSource of VariationDegrees of Freedom!Sum of Squares [Partial]Mean Squares [Partial]F RatioP Value Model~@h|?"@|гY@vz%@[g+>  B:Nozzle Position~?w/?w/?Cl @ fc]F? #! C:Deposition Temperature~?+ h?+ h?ec]?`"?  D:Deposition Time~?Ǻ @Ǻ @%:@`y>   CD~?6@6@S)@ Mb@? !Residual~V@8m4@??! Lack of Fit~@d]K?{?J{/L?? ! Pure Error~V@H3@3?"Total~#W@#;M =@###$% &S ='Ș?&R-sq =(ӅX?& R-sq(adj) =(,{؜?)Regression Information******+ ,Term -Effect - Coefficient -Standard Error -Low CI -High CI -T Value .P Value!/ Intercept!0!0R,@!0JY?!0 y),@!0z6>W{,@!0镲 vr@~!1"/B:Nozzle Position"0Gz?"0?"0JY?"0F%u{?"046W[q@$4`y> %5CD%6Gzֿ%6Gzƿ%6JY?%6Fx $п%6c]Kȷ%6}?5^ %7Mb@?>dd  ThicknessDExperimentResponse`P  6 Thickness `Pn-@uVN,@S㥛D,@!rh,@--@)\.@ʡ)@V)@J +V+@rh+@ ףp=J,@$,@'1+@v,@bX9,@B`",@A`"+@S%.@jt+@Cl+@V--@S+@7A`,@++@5^I B-@zG+@;O,@~jt-@Zd;ߏ.@d;O.@|?5,@|?5^+@ET+@xi-@`"۹+@X9ȶ*@+@n+@/$-@-@y&1,@ r,@Dli+@">+@Qk,@/$,@Pn-@K7,@.@FԸ,@E+@&1,@V--@J +.@sh|,@+@zG!*@K7I*@"~j+@(\,@Cl*@Dl*@#~j,@(\,@w/+@v+@(\5+@zGa*@p= c+@S㥛,@B`",@V-r,@?5^I,@++@M,@5^I -@K7A`.@jt-@̌+@y&1,-@5^I ,@̌+@$*@$*@V-r+@+@~jt-@V--@㥛 ,@V-+@Zd;,@v,@Y-@/$,@7A`P+@-'+@ `???????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????? UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU? `D,@D,@D,@D,@D,@D,@:m+@:m+@:m+@:m+@:m+@:m+@ޖ:,@ޖ:,@ޖ:,@ޖ:,@ޖ:,@ޖ:,@ D+@ D+@ D+@ D+@ D+@ D+@|?5-@|?5-@|?5-@|?5-@|?5-@|?5-@+,@+,@+,@+,@+,@+,@l6-@l6-@l6-@l6-@l6-@l6-@^s!,@^s!,@^s!,@^s!,@^s!,@^s!,@mY,@mY,@mY,@mY,@mY,@mY,@D+@D+@D+@D+@D+@D+@2Zh,@2Zh,@2Zh,@2Zh,@2Zh,@2Zh,@mYw+@mYw+@mYw+@mYw+@mYw+@mYw+@6T,@6T,@6T,@6T,@6T,@6T,@S+@S+@S+@S+@S+@S+@.Œ_,@.Œ_,@.Œ_,@.Œ_,@.Œ_,@.Œ_,@ t@+@ t@+@ t@+@ t@+@ t@+@ t@+@ `????????????????????????????????????????????????????????????????????????????????????????????????(\R,@!)?3TS? 333333?    I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD               @Ȩ@Modely)(A?o ?k@ ?6?A:Susceptor-Rotation Method?N_mn? ?=:h@B:Nozzle Position?@$? ?' ?C:Deposition Temperature=?Zi? ?%k6@D:Deposition Timel| >e @ ?p?BCYX#rJ?5"+W? ?j/?ABCD$?Ht7?  @V@Residual;=6@ "@B9? Lack of FitEB o?h @ T@ Pure Error.23@   (\R,@P.5\m~,@Sİ&,@ Interceptk9ݤd?@Ok+q@ &x0Oԣ&x0OԳL)H ?6 2sٿA:Susceptor-Rotation MethodF?k9ݤd?W 7g?7g?i?fFC?B:Nozzle Position?k9ݤd?K? e#ѣe#ѳw#" ? ؿC:Deposition Temperature?k9ݤd?Ůc \?\?ؐ>*?;1e?D:Deposition Timem| >k9ݤd?E\:@ 8v?8v?%L?n/$;#BCX#rJ?k9ݤd?/&(? o?o?iJ+@v,@uVN,@FԸ,@zG+@++@v,@Dl*@n+@+@J +V+@zG!*@ET+@5^I ,@V--@p= c+@Qk,@Y-@S㥛D,@E+@;O,@M,@bX9,@#~j,@/$-@~jt-@rh+@K7I*@xi-@̌+@S+@S㥛,@/$,@/$,@!rh,@&1,@~jt-@5^I -@B`",@(\,@-@V--@ ףp=J,@"~j+@`"۹+@$*@7A`,@B`",@Pn-@7A`P+@--@V--@Zd;ߏ.@K7A`.@A`"+@w/+@y&1,@㥛 ,@$,@(\,@X9ȶ*@$*@++@V-r,@K7,@-'+@)\.@J +.@d;O.@jt-@S%.@v+@ r,@V-+@ `???????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????? UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU? `:md+@:md+@V㥛ļ+@V㥛ļ+@^s+@^s+@rE,@rE,@D-@D-@8Th-@8Th-@هϰ7,@هϰ7,@|&1,@|&1,@:md+@:md+@V㥛ļ+@V㥛ļ+@^s+@^s+@rE,@rE,@D-@D-@8Th-@8Th-@هϰ7,@هϰ7,@|&1,@|&1,@:md+@:md+@V㥛ļ+@V㥛ļ+@^s+@^s+@rE,@rE,@D-@D-@8Th-@8Th-@هϰ7,@هϰ7,@|&1,@|&1,@:md+@:md+@V㥛ļ+@V㥛ļ+@^s+@^s+@rE,@rE,@D-@D-@8Th-@8Th-@هϰ7,@هϰ7,@|&1,@|&1,@:md+@:md+@V㥛ļ+@V㥛ļ+@^s+@^s+@rE,@rE,@D-@D-@8Th-@8Th-@هϰ7,@هϰ7,@|&1,@|&1,@:md+@:md+@V㥛ļ+@V㥛ļ+@^s+@^s+@rE,@rE,@D-@D-@8Th-@8Th-@هϰ7,@هϰ7,@|&1,@|&1,@ `????????????????????????????????????????????????????????????????????????????????????????????????(\R,@K>? o }>? ?    I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD               @hz%@Model)M2>~|.@"@ ?h~ @B:Nozzle Position.WNRD?$? ?|"#?C:Deposition TemperatureĂ?Zi? ?:@D:Deposition Timebnh>e @ ?F)@CDG` A?(@  V@Residualzl4@ @N? Lack of FitX}?f? V@ Pure Error,WeJ3@    (\R,@P.5+Y{,@wn),@ Intercept"?M vr@  g?g?Io"=?_ {?B:Nozzle PositionPWNRD?"?^Q?  }#ѣ}#ѳ[?*{ NC:Deposition Temperature?"?|@  Ȯ\?Ȯ\?ӻ?R[s7*?D:Deposition Time`nh>"?)tYq@  ͅ)ƿͅ)ֿkŷ{#пCD` A?"?o_R}                              (\R,@g?}#ѣȮ\?ͅ)ƿ   `????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????ffffff?     P.5           I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD     ?       I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD     ?    1  ThicknessDExperimentResponsep  6 Thickness `ʡ)@sh|,@|?5,@̌+@jt+@(\5+@Dli+@Zd;,@Pn-@.@5^I B-@?5^I,@'1+@Cl*@+@V-r+@V)@+@|?5^+@y&1,-@Cl+@zGa*@">+@v,@uVN,@FԸ,@zG+@++@v,@Dl*@n+@+@J +V+@zG!*@ET+@5^I ,@V--@p= c+@Qk,@Y-@S㥛D,@E+@;O,@M,@bX9,@#~j,@/$-@~jt-@rh+@K7I*@xi-@̌+@S+@S㥛,@/$,@/$,@!rh,@&1,@~jt-@5^I -@B`",@(\,@-@V--@ ףp=J,@"~j+@`"۹+@$*@7A`,@B`",@Pn-@7A`P+@--@V--@Zd;ߏ.@K7A`.@A`"+@w/+@y&1,@㥛 ,@$,@(\,@X9ȶ*@$*@++@V-r,@K7,@-'+@)\.@J +.@d;O.@jt-@S%.@v+@ r,@V-+@ `???????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????? UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU?UUUUUU? `ƒy-+@r= ףp+@zG+@1y+@1,@+@6G,@g8,@Gz.-@أp= W-@L-@"Q-@~Gz,@ IS*+@,@,@ƒy-+@r= ףp+@zG+@1y+@1,@+@6G,@g8,@Gz.-@أp= W-@L-@"Q-@~Gz,@ IS*+@,@,@ƒy-+@r= ףp+@zG+@1y+@1,@+@6G,@g8,@Gz.-@أp= W-@L-@"Q-@~Gz,@ IS*+@,@,@ƒy-+@r= ףp+@zG+@1y+@1,@+@6G,@g8,@Gz.-@أp= W-@L-@"Q-@~Gz,@ IS*+@,@,@ƒy-+@r= ףp+@zG+@1y+@1,@+@6G,@g8,@Gz.-@أp= W-@L-@"Q-@~Gz,@ IS*+@,@,@ƒy-+@r= ףp+@zG+@1y+@1,@+@6G,@g8,@Gz.-@أp= W-@L-@"Q-@~Gz,@ IS*+@,@,@ `TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?TUUUUU?(\R,@__1?偷g? ?    I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD               .@ &@ModelL?&'%@ ?Ee?A:Susceptor-Rotation Method?K_mn? ?`=@B:Nozzle Position) 3?`$? ?3Dn`?C:Deposition Temperature>b*?Zi? ?YC8@D:Deposition Time;?)>e @ ?8qv?AB%?@&*.U? ?lJD?ACN?B? ? ѼI*?ADdZ? Q? ?Jh?BCșx?5"+W? ?JqIh?BDuk?=? ?H{(@CDK/3_K?(@ ?X~?ABC/8?J4? ?5 8?ABD G?(fҎ? ?t"G?ACD'A8p?_vO? ?A?BCD&gq?w>? ??!D?ABCD@i?0t7?  T@Residual/23@ T@ Pure Error-23@    (\R,@P.5|,@77-(,@ Intercept0x?Kq@  -&x0Oԣ-&x0OԳ Ս?2:A:Susceptor-Rotation Methodb?0x?.b  g?g?(pu? 潘l?B:Nozzle Positionh 3?0x??  }#ѣ}#ѳ!͐?ZMC:Deposition Temperatureb*?0x?籍  Ȯ\?Ȯ\?Уz?:|N?D:Deposition Time?)>0x?,ݳ@  kuL`n?kuL`~?s$?9* >AB?0x?!?  (mY(mY3˶?%_ACN?0x?l#Z/  dN$X?KxADZ?0x?u-  8v?8v?L?-BCșx?0x?d?   IS*Ύ IS*Ξ$.MW? BDAk?0x?1;Zӿ  ͅ)ƿͅ)ֿ}@`fpVпCD/3_K?0x?)_־   (\?(\??IablABCb08?0x?>(S\?  K{ͅ?K{ͅ?$W=2e?s޾ABD G?0x?_j(?  QQCA;Z?ACDNA8p?0x?&Lӿ   a#? a#?ъn&i?RJ}BCDBgq?0x?S#^?  o?o?h?_aABCD@i?0x?O?                             (\R,@-&x0Oԣg?}#ѣȮ\?kuL`n?(mY8v? IS*Ύͅ)ƿ(\?K{ͅ?Q a#?o?  ffffff?     P.5           I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD     ?       I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD     ?    1 Thickness Std.DExperimentResponseP  6Thickness Std. wZ!俘ăRD^;LϋO} 翱ԗc䧺eō32V<1忡D#ώչK o~<p迨,* ???????????????????????????????? ??? ,H,Hy)y)  A,A,,H,Hy)y)  A,A, ????????????????e,ZrN? ;e? @333333?    I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD               @Mj@Model_+M\?4+? ?;@B:Nozzle Position9}?d#? ?ւ#v4 @C:Deposition TemperaturewΠ?$N,%?  *@Residualh/? ? V@ Lack of FitÈݾ?ςɈz? (@ Pure Error-?    P.5yn}: Intercept<e,ZrN?8L  :~pC:~pCOă;L#B:Nozzle Position9}?e,ZrN?ѝF@  D䢱D䢱n$hC:Deposition TemperatureΠ?e,ZrN?s                             :~pCD䢱   ?????????????????????????????????????????????????????????????????????????????????????????????????????????     P.5           I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD     333333? @      I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD     333333? @   1 Variability AnalysisDFolioPB  1234567           U `       `    Continuous21210Low  ? ʡ)@AB?     Oscillating21210Low ? ?7 sh|,@ܒoO?     Continuous61210Low ? ?_ |?5,@Q?     Oscillating61210Low ?? ?9 ̌+@jN?     Continuous21220Low ? ? jt+@ŤKg?     Oscillating21220Low ?? ?# (\5+@{?     Continuous61220Low ?? ?W Dli+@N?     Oscillating61220Low ??? ? Zd;,@ Q ?     Continuous21210High ? ? Pn-@8+ ?      Oscillating21210High ?? ?V .@2N?      Continuous61210High ?? ?+ 5^I B-@؈k?      Oscillating61210High ??? ?Y ?5^I,@?x}?      Continuous21220High ?? ?< '1+@ r%?      Oscillating21220High ??? ?  Cl*@%b>?     Continuous61220High ??? ?G +@^'?     Oscillating61220High ???? ? V-r+@ꖌQ ?     Continuous21210Low  ?T V)@P.5     Oscillating21210Low ? ?C +@P.5     Continuous61210Low ? ? |?5^+@P.5     Oscillating61210Low ?? ?A y&1,-@P.5     Continuous21220Low ? ?8 Cl+@P.5     Oscillating21220Low ?? ?5 zGa*@P.5     Continuous61220Low ?? ? ">+@P.5     Oscillating61220Low ??? ?! v,@P.5     Continuous21210High ? ?] uVN,@P.5     Oscillating21210High ?? ? FԸ,@P.5     Continuous61210High ?? ?  zG+@P.5     Oscillating61210High ??? ?- ++@P.5     Continuous21220High ?? ?" v,@P.5     Oscillating21220High ??? ?' Dl*@P.5     Continuous61220High ??? ?` n+@P.5     Oscillating61220High ???? ? +@P.5      Continuous21210Low  ? J +V+@P.5! !    Oscillating21210Low ? ?^ zG!*@P.5" "    Continuous61210Low ? ?F ET+@P.5# #    Oscillating61210Low ?? ?  5^I ,@P.5$ $    Continuous21220Low ? ?& V--@P.5% %    Oscillating21220Low ?? ?$ p= c+@P.5& &    Continuous61220Low ?? ?M Qk,@P.5' '    Oscillating61220Low ??? ?. Y-@P.5( (    Continuous21210High ? ?B S㥛D,@P.5) )    Oscillating21210High ?? ? E+@P.5* *    Continuous61210High ?? ? ;O,@P.5+ +    Oscillating61210High ??? ?E M,@P.5, ,    Continuous21220High ?? ?N bX9,@P.5- -    Oscillating21220High ??? ?? #~j,@P.5. .    Continuous61220High ??? ? /$-@P.5/ /    Oscillating61220High ???? ?O ~jt-@P.50 0    Continuous21210Low  ? rh+@P.51 1    Oscillating21210Low ? ?  K7I*@P.52 2    Continuous61210Low ? ?J xi-@P.53 3    Oscillating61210Low ?? ?> ̌+@P.54 4    Continuous21220Low ? ?( S+@P.55 5    Oscillating21220Low ?? ?P S㥛,@P.56 6    Continuous61220Low ?? ? /$,@P.57 7    Oscillating61220Low ??? ? /$,@P.58 8    Continuous21210High ? ?S !rh,@P.59 9    Oscillating21210High ?? ?/ &1,@P.5: :    Continuous61210High ?? ?, ~jt-@P.5; ;    Oscillating61210High ??? ? 5^I -@P.5< <    Continuous21220High ?? ?= B`",@P.5= =    Oscillating21220High ??? ?I (\,@P.5> >    Continuous61220High ??? ?@ -@P.5? ?    Oscillating61220High ???? ?: V--@P.5@ @    Continuous21210Low  ?\  ףp=J,@P.5A A    Oscillating21210Low ? ?D "~j+@P.5B B    Continuous61210Low ? ?X `"۹+@P.5C C    Oscillating61210Low ?? ?H $*@P.5D D    Continuous21220Low ? ?% 7A`,@P.5E E    Oscillating21220Low ?? ?  B`",@P.5F F    Continuous61220Low ?? ? Pn-@P.5G G    Oscillating61220Low ??? ? 7A`P+@P.5H H    Continuous21210High ? ?U --@P.5I I    Oscillating21210High ?? ?[ V--@P.5J J    Continuous61210High ?? ?L Zd;ߏ.@P.5K K    Oscillating61210High ??? ?Z K7A`.@P.5L L    Continuous21220High ?? ?* A`"+@P.5M M    Oscillating21220High ??? ?3 w/+@P.5N N    Continuous61220High ??? ?0 y&1,@P.5O O    Oscillating61220High ???? ?Q 㥛 ,@P.5P P    Continuous21210Low  ?; $,@P.5Q Q    Oscillating21210Low ? ? (\,@P.5R R    Continuous61210Low ? ? X9ȶ*@P.5S S    Oscillating61210Low ?? ?  $*@P.5T T    Continuous21220Low ? ?4 ++@P.5U U    Oscillating21220Low ?? ?R V-r,@P.5V V    Continuous61220Low ?? ? K7,@P.5W W    Oscillating61220Low ??? ?2 -'+@P.5X X    Continuous21210High ? ?6 )\.@P.5Y Y    Oscillating21210High ?? ? J +.@P.5Z Z    Continuous61210High ?? ? d;O.@P.5[ [    Oscillating61210High ??? ? jt-@P.5\ \    Continuous21220High ?? ?) S%.@P.5] ]    Oscillating21220High ??? ?K v+@P.5^ ^    Continuous61220High ??? ?  r,@P.5_ _    Oscillating61220High ???? ?1 V-+@P.5` `  ư>?      @@@@v@v@TahomaDBTahomaDB ????{Gz?{Gz?{Gz??333333?TahomaTahoma|Tahoma|TahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahoma|Z   GF ???d Upper Legend Lower LegendCurrent Upper TitleCurrent Lower TitleCurrent Main TitleCurrent X-Axis TitleCurrent Y-Axis TitleColorColor = Size = X = Y =  Starts at:  Ends at:  Duration: ???*****Z      ? ? ? ?    Continuous Oscillating 26 @@ LowHigh `????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????????  Susceptor-Rotation Method Nozzle Position Deposition Temperature Deposition Time   Thickness` Thickness Std.   I  I      A  A      B  B      C  C      D  D      AB  AB      AC  AC      AD  AD      BC  BC      BD  BD      CD  CD      ABC  ABC      ABD  ABD      ACD  ACD      BCD  BCD      ABCD  ABCD                   Block 1    1    Continuous Oscillating 26 @@ LowHigh  Susceptor-Rotation Method Nozzle Position Deposition Temperature Deposition Time`       1 1= =5%X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H p p   p@@ p@ p @  p8 @ p@ p p8 8 p@ p p   p8 8  Design   dMbP?_*+%&A Page &P&?'?(?)?"d??` Q _ Thickness Std. ThicknessD:Deposition Time C:Deposition Temperature B:Nozzle Position "A:Susceptor-Rotation Method  Block NumberCenter Points Run OrderStandard Order}F}A F}F}B F}F}GF} FF} F                                 ! " # $ % & ' ( ) * + , - . / 0 1 2 3 4 5 6 7 8 9 : ; < = > ? @ A B C D E F G H I J K L M N O P Q R S T U V W X Y Z [ \ ] ^ _ ?8@?? Continuous@@ Lowʡ)@ B?~ ?@K@?? Oscillating@@ Lowsh|,@ {?~ @@W@?? Continuous@@ Low|?5,@ ڊe?~ @@L@?? Oscillating@@ Low̌+@ a+e?~ @@ @?? Continuous@@ Lowjt+@ H}8g?~ @@A@?? Oscillating@@ Low(\5+@ ea?~ @@U@?? Continuous@@ LowDli+@ B?~ @ @9@?? Oscillating@@ LowZd;,@ "uq ?~  @"@=@?? Continuous@@ HighPn-@ W[?~ "@ $@U@??  Oscillating @@ High .@ ǘ?~ $@ &@E@??  Continuous @@ High 5^I B-@ a+e?~ &@ (@@V@??  Oscillating @@ High ?5^I,@ !lV}?~ (@ *@N@??  Continuous @@ High '1+@ q -?~ *@ ,@*@??  Oscillating @@ High Cl*@  F%u?~ ,@.@Q@?? Continuous@@ High+@ QI&?~ .@0@@?? Oscillating@@ HighV-r+@ ı.n?~ 0@1@U@?? Continuous@@ LowV)@  *~ 1@2@P@?? Oscillating@@ Low+@  *~ 2@3@@?? Continuous@@ Low|?5^+@  *~ 3@4@@P@?? Oscillating@@ Lowy&1,-@  *~ 4@5@L@?? Continuous@@ LowCl+@  *~ 5@6@J@?? Oscillating@@ LowzGa*@  *~ 6@7@3@?? Continuous@@ Low">+@  *~ 7@8@@@?? Oscillating@@ Lowv,@  *~ 8@9@@W@?? Continuous@@ HighuVN,@  *~ 9@:@?@?? Oscillating@@ HighFԸ,@  *~ :@;@&@?? Continuous@@ HighzG+@  *~ ;@<@F@?? Oscillating@@ High++@  *~ <@=@A@?? Continuous@@ Highv,@  *~ =@>@C@?? Oscillating@@ HighDl*@  *~ >@?@X@?? Continuous@@ Highn+@  *~ ?@@@@?? Oscillating@@ High+@  *~ @@ @@.@??  Continuous @@ Low J +V+@ *~ @@!A@W@??! Oscillating!@@ !Low!zG!*@ ! *~! A@"A@Q@??" Continuous"@@ "Low"ET+@ " *~" A@#B@$@??# Oscillating#@@ #Low#5^I ,@ # *~# B@$B@C@??$ Continuous$@@ $Low$V--@ $ *~$ B@%C@B@??% Oscillating%@@ %Low%p= c+@ % *~% C@&C@@S@??& Continuous&@@ &Low&Qk,@ & *~& C@'D@G@??' Oscillating'@@ 'Low'Y-@ ' *~' D@(D@P@??( Continuous(@@ (High(S㥛D,@ ( *~( D@)E@,@??) Oscillating)@@ )High)E+@ ) *~) E@*E@@??* Continuous*@@ *High*;O,@ * *~* E@+F@@Q@??+ Oscillating+@@ +High+M,@ + *~+ F@,F@S@??, Continuous,@@ ,High,bX9,@ , *~, F@-G@O@??- Oscillating-@@ -High-#~j,@ - *~- G@.G@@??. Continuous.@@ .High./$-@ . *~. G@/H@S@??/ Oscillating/@@ /High/~jt-@ / *~/ H@0H@<@??0 Continuous0@@ 0Low0rh+@ 0 *~0 H@1I@"@??1 Oscillating1@@ 1Low1K7I*@ 1 *~1 I@2I@R@??2 Continuous2@@ 2Low2xi-@ 2 *~2 I@3J@O@??3 Oscillating3@@ 3Low3̌+@ 3 *~3 J@4J@D@??4 Continuous4@@ 4Low4S+@ 4 *~4 J@5K@T@??5 Oscillating5@@ 5Low5S㥛,@ 5 *~5 K@6K@4@??6 Continuous6@@ 6Low6/$,@ 6 *~6 K@7L@2@??7 Oscillating7@@ 7Low7/$,@ 7 *~7 L@8L@T@??8 Continuous8@@ 8High8!rh,@ 8 *~8 L@9M@G@??9 Oscillating9@@ 9High9&1,@ 9 *~9 M@:M@F@??: Continuous:@@ :High:~jt-@ : *~: M@;N@???; Oscillating;@@ ;High;5^I -@ ; *~; N@<N@N@??< Continuous<@@ <High<B`",@ < *~< N@=O@@R@??= Oscillating=@@ =High=(\,@ = *~= O@>O@P@??> Continuous>@@ >High>-@ > *~> O@?P@M@??? Oscillating?@@ ?High?V--@ ? *~? P@@@P@W@??@ Continuous@@@ @Low@ ףp=J,@ @ *~@ @P@AP@Q@??A OscillatingA@@ ALowA"~j+@ A *~A P@BP@V@??B ContinuousB@@ BLowB`"۹+@ B *~B P@CQ@R@??C OscillatingC@@ CLowC$*@ C *~C Q@D@Q@B@??D ContinuousD@@ DLowD7A`,@ D *~D @Q@EQ@@@??E OscillatingE@@ ELowEB`",@ E *~E Q@FQ@>@??F ContinuousF@@ FLowFPn-@ F *~F Q@GR@@??G OscillatingG@@ GLowG7A`P+@ G *~G R@H@R@@U@??H ContinuousH@@ HHighH--@ H *~H @R@IR@V@??I OscillatingI@@ IHighIV--@ I *~I R@JR@S@??J ContinuousJ@@ JHighJZd;ߏ.@ J *~J R@KS@V@??K OscillatingK@@ KHighKK7A`.@ K *~K S@L@S@E@??L ContinuousL@@ LHighLA`"+@ L *~L @S@MS@I@??M OscillatingM@@ MHighMw/+@ M *~M S@NS@H@??N ContinuousN@@ NHighNy&1,@ N *~N S@OT@@T@??O OscillatingO@@ OHighO㥛 ,@ O *~O T@P@T@M@??P ContinuousP@@ PLowP$,@ P *~P @T@QT@0@??Q OscillatingQ@@ QLowQ(\,@ Q *~Q T@RT@:@??R ContinuousR@@ RLowRX9ȶ*@ R *~R T@SU@(@??S OscillatingS@@ SLowS$*@ S *~S U@T@U@J@??T ContinuousT@@ TLowT++@ T *~T @U@UU@T@??U OscillatingU@@ ULowUV-r,@ U *~U U@VU@6@??V ContinuousV@@ VLowVK7,@ V *~V U@WV@I@??W OscillatingW@@ WLowW-'+@ W *~W V@X@V@K@??X ContinuousX@@ XHighX)\.@ X *~X @V@YV@;@??Y OscillatingY@@ YHighYJ +.@ Y *~Y V@ZV@7@??Z ContinuousZ@@ ZHighZd;O.@ Z *~Z V@[W@1@??[ Oscillating[@@ [High[jt-@ [ *~[ W@\@W@D@??\ Continuous\@@ \High\S%.@ \ *~\ @W@]W@R@??] Oscillating]@@ ]High]v+@ ] *~] W@^W@5@??^ Continuous^@@ ^High^ r,@ ^ *~^ W@_X@ H@ ? ?_! Oscillating_!@!@ _!High_ V-+@ _ "*~_ X@>dd =5%X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma1 Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H   @   8@ 8 0 8  <   @ 0   x@@ x@ x  @  @   8@ 8 8 0@ 0 8 0  < 0 @ 0 0 x@@ x@ x  @     8@ 8    (@ 0 8  @   @ 0   x@@$x@$x  @$8@ 8 8 8@ 0  < 8 8 @ 0 8 x@@$x@$x  @$ Sheet1 Sheet2   dMbP?_*+%&A Page &P&?'?(?)?"d??Q} F}F}GF}F@@@@@@@@@ @ @ @ @ @@@@@@@@@@@@@@@# ANOVA Table$$$$$$%Source of VariationDegrees of Freedom!Sum of Squares [Partial]Mean Squares [Partial]F RatioP Value Model~@z6k@HzG?& A:Susceptor-Rotation Method~?;On?;On?Mb?J +?  B:Nozzle Position~?w/?w/?+ h@? # C:Deposition Temperature~?+ h?+ h?]Fx ?o_?  D:Deposition Time~?Ǻ @Ǻ @Hz6@z( >   BC~ ? '1Z? '1Z? V-? QI?   ABCD~ ? a2U0*? a2U0*? 333333? o_?  Residual~ @V@ ?6@ jMS?   Lack of Fit~ "@ C6 @ _vO? 6>W[?  r?   Pure Error~ T@ k 3@ ffffff? Total~ W@ ;M =@ !">5S = 0.5051 R-sq = 23.1902% R-sq(adj) = 18.0120%4Regression Information5555556&''''''( )Term*Effect* Coefficient*Standard Error*Low CI*High CI*T Value+P Value&''''''(, Intercept--R,@-|?5^?-' &,@-Bi~,@-(~k+q@~.$,A:Susceptor-Rotation Method-ףp= ׳-ܵ|У-|?5^?-Uؿ-Mb?-{/L /J +?,B:Nozzle Position-Gz?-?-|?5^?-a2U0*C?-jt?-^)?.?!,C:Deposition Temperature-ܵ|г-ܵ|У-|?5^?-Uؿ-Mb?-o_/o_?,D:Deposition Time-\(\?-\(\?-|?5^?-[ Ac?-|a2U0*?-c]F@0z( > ,BC-q= ףp?-H}?-|?5^?-H.!-Zd;O?-$?/QI? 1ABCD2{Gz?2{Gz?2|?5^?2N@a2):?2@?3o_?>dd   dMbP?_*+%&A Page &P&?'?(?)?"d??I} F}F}F}F}F@@@@@@@@@ @ @ @@@@@@F ANOVA TableGGGGGGH:Source of Variation;Degrees of Freedom!;Sum of Squares [Partial];Mean Squares [Partial];F Ratio;P Value <=>Model~?@? c??F%u??ŏ1w@@a+e? <=> B:Nozzle Position~????߾???߾??u@@{Gz? <=#> C:Deposition Temperature~??? o_Ή?? o_Ή??K7 @@ -? <=AResidual~?*@?oŏ??_Le???<=> Lack of Fit~???9vz??9vz??faV@@?߾? <=A Pure Error~?(@?Pkw??HPsb???<=BTotal~C.@CsF?CCCDE 9S = 7p_Q? 9R-sq = 8uF^? 9 R-sq(adj) = 8ڧ1?SRegression InformationTTTTTTU ITermJEffectJ CoefficientJStandard ErrorJLow CIJHigh CIJT ValueKP ValueL InterceptMMQM-C6?M:HM!lV}M&†LNv<LB:Nozzle PositionMXMXM-C6?MJ +Mj+݃MUN@O{Gz?!PC:Deposition TemperatureQy&1Qy&1Q-C6?Q h"lQJ4QʡEsR -?>dd  =,G1*X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H p p  p  p  p  Sheet1 Sheet2   dMbP?_*+%&A Page &P&?'?(?)?"d??}F>dd   dMbP?_*+%&A Page &P&?'?(?)?"d??X High PI Low PI Standard Error High CI Low CI Standard Error High CI Low CIStandard ErrorMean PredictedD:Deposition TimeC:Deposition TemperatureB:Nozzle Position A:Susceptor-Rotation Method Block}F}A F}F}B F}F}F}F} F}F >dd ƚK 0  '' & MDCR-O. &MDCR-{  --'' &MDCR-T1;0;-1; &MDCR-F \"TahomaC ^ww 0w/fK-!#ReliaSoft DOE++ - www.ReliaSoft.com2 &MDCR-T3;0;0; &MDCR-F &MDCR-S-' &MDCR-T2;0;0; &MDCR-F "Tahomac ww 0w/fK-!Optimal Solution 7Z &MDCR-T3;0;0; &MDCR-F &MDCR-S >"TahomaC `ww 0w/fK-!Susceptor-Rotation...$ &MDCR-T3;0;0; &MDCR-F &MDCR-S ! X = 1.0000% &MDCR-T3;0;0; &MDCR-F &MDCR-S!Nozzle Position;$ &MDCR-T3;0;0; &MDCR-F &MDCR-S ! X = -1.0000;% &MDCR-T3;0;0; &MDCR-F &MDCR-S!Deposition Temper...$ &MDCR-T3;0;0; &MDCR-F &MDCR-S ! X = 1.0000%- &MDCR-T3;0;0; &MDCR-F &MDCR-S!Deposition Time;$ &MDCR-T3;0;0; &MDCR-F &MDCR-S ! X = -1.0000;%  &MDCR-T3;0;0; &MDCR-F &MDCR-S>"Tahomac ww 0w/fK- ! Y = 0.4772j &MDCR-T3;0;0; &MDCR-F &MDCR-S!Thickness Std. (Minimize) &MDCR-T3;0;0; &MDCR-F &MDCR-S-! &MDCR-T4;0;0; &MDCR-F ! &MDCR-T4;0;0; &MDCR-F$!$ &MDCR-T4;0;0; &MDCR-F/!/ &MDCR-T4;0;0; &MDCR-F= != &MDCR-T4;0;0; &MDCR-F!!= &MDCR-T4;0;0; &MDCR-F= &MDCR-T4;0;0; &MDCR-F-"! &MDCR-T4;0;0; &MDCR-F\"TahomaC cww 0w/fK-!1|" &MDCR-T5;0;0; &MDCR-F &MDCR-S"g !g &MDCR-T4;0;0; &MDCR-F!2|"% &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F\"Tahomac ww 0w/fK- !0.468RR &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F !0.527RP &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F !0.480RR &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F !0.492RQ &MDCR-T5;0;0; &MDCR-F &MDCR-S &MDCR-T4;0;0; &MDCR-F !0.504RQ &MDCR-T5;0;0; &MDCR-F &MDCR-S   &MDCR-T4;0;0; &MDCR-F !0.515RQ  &MDCR-T5;0;0; &MDCR-F &MDCR-S" ! &MDCR-T4;0;0; &MDCR-F\"TahomaC jww 0w/fK-!1|" &MDCR-T5;0;0; &MDCR-F &MDCR-S"r!r &MDCR-T4;0;0; &MDCR-F!2|"0 &MDCR-T5;0;0; &MDCR-F &MDCR-S"! &MDCR-T4;0;0; &MDCR-F !-1.000V$ &MDCR-T5;0;0; &MDCR-F &MDCR-S"~!~ &MDCR-T4;0;0; &MDCR-F !1.000R$< &MDCR-T5;0;0; &MDCR-F &MDCR-S"! &MDCR-T4;0;0; &MDCR-F !-0.600V$ &MDCR-T5;0;0; &MDCR-F &MDCR-S"! &MDCR-T4;0;0; &MDCR-F !-0.200V$ &MDCR-T5;0;0; &MDCR-F &MDCR-S"=!= &MDCR-T4;0;0; &MDCR-F !0.200R$ &MDCR-T5;0;0; &MDCR-F &MDCR-S"]!] &MDCR-T4;0;0; &MDCR-F !0.600R$ &MDCR-T5;0;0; &MDCR-F &MDCR-S"! &MDCR-T4;0;0; &MDCR-F!1|" &MDCR-T5;0;0; &MDCR-F &MDCR-S"! &MDCR-T4;0;0; &MDCR-F!2|"G &MDCR-T5;0;0; &MDCR-F &MDCR-S--)0&UMDCR-TM8;600002;1;Susceptor-Rotation Method vs Thickness Std. X = -1.000 Y = 0.477 &MDCR-F) 5 /&TMDCR-TL8;600002;2;Susceptor-Rotation Method vs Thickness Std. X = 1.000 Y = 0.477 &MDCR-F)  +&KMDCR-TC8;600003;1;Nozzle Position vs Thickness Std. X = -1.000 Y = 0.477 &MDCR-F@*&JMDCR-TB8;600003;2;Nozzle Position vs Thickness Std. X = 1.000 Y = 0.468 &MDCR-F0%"k  C   d<]5}#&;MDCR-T38;600004;0;Deposition Temperature vs Thickness Std.? &MDCR-F)+&KMDCR-TC8;600005;1;Deposition Time vs Thickness Std. X = -1.000 Y = 0.477 &MDCR-F)W*&JMDCR-TB8;600005;2;Deposition Time vs Thickness Std. X = 1.000 Y = 0.477 &MDCR-F-g !g &'MDCR-T8;509;0;Factor Value X = 1.000 &MDCR-F ! &(MDCR-T 8;509;0;Factor Value X = -1.000 &MDCR-F~!~&'MDCR-T8;509;0;Factor Value X = 1.0000 &MDCR-F!&(MDCR-T 8;509;0;Factor Value X = -1.000 &MDCR-F-= &)MDCR-T!8;510;0;Response Value Y = 0.477 &MDCR-F\"Tahomac ww 0w/fK-!Variability Analysis! &MDCR-T6;0;0; &MDCR-F &MDCR-S-!& &MDCR-T6;0;0; &MDCR-F!& &MDCR-T6;0;0; &MDCR-F !Factor vs ResponseD!&MDCR-T 7;600000;0;! &MDCR-F &MDCR-S b!b!&MDCR-T 7;600000;0;! &MDCR-F!Continuous Functions1"&MDCR-T 7;600000;0;! &MDCR-F &MDCR-SE!7!&MDCR-T 7;600001;0;! &MDCR-F!Discreet Function11"&MDCR-T 7;600001;0;" &MDCR-F &MDCR-S!& &MDCR-T6;0;0; &MDCR-F-v!v! &MDCR-T7;509;0; &MDCR-F ! Factor Value 1" &MDCR-T7;509;0; &MDCR-F &MDCR-S-(!(! &MDCR-T7;510;0; &MDCR-F !Response Value1" &MDCR-T7;510;0; &MDCR-F &MDCR-S ! User's Name;! &MDCR-T6;0;0; &MDCR-F &MDCR-S !CompanyS! &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 1/25/2008| ! &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 2:05:54 PM-!! &MDCR-T6;0;0; &MDCR-F &MDCR-S-!!!& &MDCR-T6;0;0; &MDCR-F &MDCR-}W--"SystemK/fK !8-   $@F@.@ ??   ! GF@$@X@?dEffect Probability)User Name Company 8/5/2008 10:15:43 AM#ReliaSoft DOE++ - www.ReliaSoft.com Alpha = 0.15!Normal Probability Plot of EffectStandardized Effect (T Value) ProbabilityColorColor = Size = X = Y =  Starts at:  Ends at:  Duration: ???*****#ReliaSoft DOE++ - www.ReliaSoft.comZ @@@@v@v@TahomaDBTahomaDB o_?_Fj?{Gz?c]Kȵ?gj+?ͪժ?y):?#G?333333?TahomaTahoma|Tahoma|TahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahomaDBTahoma|Z rqThickness Std.Significant EffectsThickness Std.(Effect Points)Significant Effects Thickness Std. Y' = Natural Logd?Thickness Std.Distribution Line!Thickness Std.(Distribution Line)Distribution Line Thickness Std. Y' = Natural Logd?  Thickness Std.Significant EffectsThickness Std.(Effect Points)Significant Effects Thickness Std. Y' = Natural Logd?B:Nozzle PositionB:Nozzle PositionѝF@9@C:Deposition TemperatureC:Deposition TemperaturesR@Thickness Std.Distribution Line!Thickness Std.(Distribution Line)Distribution Line Thickness Std. Y' = Natural Logd?4(\ׅzW>swz> ףp= .4>Gz=i>Qy>(\(lڟ%a>233333 a?< ףp=hQY30?FzG_ƃI?PQB@0fgb?Q}ua y? =?X@C ףp=@)X@933333@񿳳X@/\(@i{X@%Q@A6X@Gz@X@ףp= @"Tahoma2 h ww 0w% f-!Standardized Effect (T Value)f%n &MDCR-T3;0;0; &MDCR-F &MDCR-S>"Tahoma ww 0w% f- ! 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User Name ! &MDCR-T6;0;0; &MDCR-F &MDCR-S !CompanyS!! &MDCR-T6;0;0; &MDCR-F &MDCR-S !8/5/2008Z"! &MDCR-T6;0;0; &MDCR-F &MDCR-S ! 10:15:43 AM; #! &MDCR-T6;0;0; &MDCR-F &MDCR-S-#!#& &MDCR-T6;0;0; &MDCR-F &MDCR-}H--"System% f !@- =X1Tahoma1Tahoma1Tahoma1Tahoma1Tahoma1 Tahoma"$"#,##0_);\("$"#,##0\)!"$"#,##0_);[Red]\("$"#,##0\)""$"#,##0.00_);\("$"#,##0.00\)'""$"#,##0.00_);[Red]\("$"#,##0.00\)5*0_("$"* #,##0_);\("$"* #,##0\);_("$"* "-"_);_(@_),)'_(* #,##0_);\(* #,##0\);_(* "-"_);_(@_)=,8_("$"* #,##0.00_);\("$"* #,##0.00\);_("$"* "-"??_);_(@_)4+/_(* #,##0.00_);\(* #,##0.00\);_(* "-"??_);_(@_)                + ) , *  H x@@ x@ x  @ 8@ 8    (@ 0 8  @   @ 0       x@@ x@ x  @ 8@ 8 8 8@ 0  < 8 8 @ 0 8   2008-08-04 12:23:52   dMbP?_*+%&A Page &P&?'?(?)?"d?? Q} F}F}F}F}F@@@   @@@@@@@@@@@@@@@@@2008-08-04 12:23:52 Alpha: 0.15Transform: Y' = ln Y+5"All selected terms are alias free.+5"Terms selected to be in the model: Main Effects B, C1 5(Independent terms included in the model:  Main Effects B, C  ANOVA Table Source of VariationDegrees of Freedom!Sum of Squares [Partial]Mean Squares [Partial]F RatioP Value Model~@ c?F%u?ŏ1w@a+e?  B:Nozzle Position~??߾??߾?u@{Gz? # C:Deposition Temperature~? o_Ή? o_Ή?K7 @ -?  Residual~*@oŏ?_Le? Lack of Fit~?9vz?9vz?faV@?߾?  Pure Error~(@Pkw?HPsb?!Total~".@"sF?"""#$ %S =&p_Q?%R-sq ='uF^?% R-sq(adj) ='ڧ1?(Regression Information))))))* +Term,Effect, Coefficient,Standard Error,Low CI,High CI,T Value-P Value. Intercept//Q/-C6?/:H/!lV}/&†L0v<.B:Nozzle Position/X/X/-C6?/J +/j+݃/UN@1{Gz?!2C:Deposition Temperature3y&13y&13-C6?3 h"l3J43ʡEs4 -?>dd aAa_MainProject 4!2 Level Full Factorial Design.doc,C:\DOCUME~1\MCAROL~1\LOCALS~1\Temp\RSFE4.tmpࡱ> QSPVP%` )bjbj"x"x 4@@3  (R(R(R8`RS fST:LTLTLTWWWfffffff$hhj;f- "YLWPW@"Y"Y;fLTLThf\\\"Y02LT LTf\"Yf\\^  3_LTS 0Iy(RRZ^!a~f0f_,rkZrk3_3_Jrk }_WLW6\X,>XWWW;f;f[^WWWf"Y"Y"Y"Y (4$ 4  Example Consider that one of the initial steps in fabricating integrated circuit (IC) devices is to grow an epitaxial layer on polished silicon wafers. The wafers are mounted on a six-faceted cylinder (two wafers per facet), called a susceptor, which is spun inside a metal bell jar. The jar is injected with chemical vapors through nozzles at the top of the jar and heated. The process continues until the epitaxial layer grows to a desired thickness. The nominal value for thickness is 14.5 m with specification limits of 14.5 EMBED Equation.3 0.5. The current settings caused variations that exceeded the specification by 1.0 m. Thus, the experimenters first need to find the factors that affect the process. Then further experiments will be conducted to optimize the process. There are four experimental factors. FactorNameLevel -Level +Asusceptor-rotation methodcontinuousoscillatingBnozzle position26Cdeposition temperature12101220Ddeposition timelowhigh Design the Experiment To find the important factors, a two level full factorial design is conducted. The design matrix and the data are given in the 2 Level Full Factorial Design Folio. You can also reproduce the design by the following steps. Step 1: Add a new Standard Folio by selecting Add Folio from the Project menu. Step 2: In the first step of the Design Wizard, select Factorial Design then click Next.  Step 3: In the second step of the Design Wizard, select 2 Level Full Factorial Design then click Next.  Step 4: In the third step of the Design Wizard, use the settings shown next.  Step 5: Click the Factor Properties button and, in the Factor Properties window, use the settings shown next then click OK.  Step 6: Click the Response Properties button and, in the Response Properties window, enter the name of the response, as shown next, then click OK.  Step 7: Click Next to view the design summary, then click Finish to create the Standard Folio containing the two level full factorial design. Alternatively, you can skip the design review step by clicking Finish in the third step of the Design Wizard. The run order is randomly generated when you create the design. It may be different from the Folio in the example file. You can conduct the experiment according to the run order in the design matrix and record all the response values. Analysis and Results The design and the data are provided in the 2 Level Full Factorial Design Folio. You can proceed using this Folio or you can copy the data to the Folio you just created. Make sure you sort both Folios by the Standard Order column before you copy and paste the data: select Standard Order in the Sort By area in the Control Panel to sort the Data Sheet by the Standard Order column. Once the data set has been entered in the Data Sheet, you can analyze it. Step 1: Double-click the 2 Level Full Factorial Design Folio to open it. The Design tab will be displayed. Step 2: Specify to include all effects up to four-way interactions in the model. To do this, click the Select Effects icon and, in the Effects window, use the settings shown next then click OK.  Step 3: On the Options page of the Control Panel, select to use Individual Terms in the analysis. Step 4: Return to the Main page of the Control Panel and click the Calculate icon. The ANOVA table and the Regression Information table for the model are provided on the Analysis tab, which is added to the Folio upon calculation. Step 5: Click the Plot icon to add the Plot tab to the Folio. Step 6: Select Pareto Chart from the Plot Type drop-down in the Control Panel. The pareto chart shows that effects B, D and CD are significant.  Optimization The results for the reduced model and the optimization are given in the Optimization Folio. You can also reproduce the Folio by the following steps. Step 1: Right-click the 2 Level Full Factorial Design Folio in the Project Explorer and select Duplicate Item from the shortcut menu that appears. Rename the new Folio. Step 2: Click the Select Effects icon and click the Select Significant Effects button to select only the significant effects to calculate the new model, as shown next, then click OK. Note that your selections in the Effects window must be hierarchical-- if you select to include any second order or greater effect, all related main effects must also be included. Thus, you must include effect C in order to include CD in the model.  Step 3: Click Calculate. The coefficients for the model are: Regression InformationTermEffectCoefficientStandard ErrorLow CIHigh CIT ValueP ValueIntercept14.16130.047914.081614.2409295.37810B:Nozzle Position0.17250.08630.04790.00660.16591.79950.0753C:Deposition Temperature-0.0774-0.03870.0479-0.11840.041-0.80740.4215D:Deposition Time0.490.2450.04790.16540.32475.11071.76E-06CD-0.345-0.17250.0479-0.2522-0.0929-3.59850.0005 Step 4: Click the Optimization icon in the Control Panel and, in the Optimization Settings window, use the settings shown next then click OK.  The optimization results are: BCDPredicted ThicknessPosition 21210.7392High14.5Position 61214.8235High14.5 You can view these in the optimal solutions plot or you can click the View All Solutions icon in the Control Panel to view the solutions in the Optimization Solutions window, which displays all optimal solutions in numeric format. Variability Analysis Although both optimum solutions give the same predicted thickness, the variability at these two settings may be different. It is important to identify which solution is better in terms of variability. To do this, you need to study the variability of each setting. In variability analysis, the response is the standard deviation of the observations at each setting. The results of the variability analysis are given in the Variability Analysis Folio. You can also reproduce the Folio by the following steps. Step 1: Duplicate the 2 Level Full Factorial Design Folio and rename the new Folio. Step 2: In the duplicate design, click the Variability Analysis icon and select the Thickness response column for variability analysis and select all factors to be considered in the variability analysis, as shown next, then click OK.  A new response column called Thickness Std. is added to the Folio. The values in this column are standard deviations of the observations at each factor setting. Step 3: Select the Thickness Std. column for inclusion in the analysis by selecting the checkbox in the column header. Clear the checkbox in the Thickness column header. Step 4: Usually, if the response is standard deviation, the log transformation should be used. To do this, click the Transformation icon and, in the Transformation window, select the Natural Log transformation and click OK.  Step 5: Click Calculate. The regression coefficients for the model for Thickness Std. are: TermCoefficientStandard ErrorLow CIHigh CIT ValueP ValueIntercept-0.72250.0128-0.7421-0.7028-56.24631.11E-16B-0.02930.0128-0.049-0.0097-2.28140.04C-0.0280.0128-0.0477-0.0084-2.18150.0481 Applying this model to the 2 optimal solutions in the analysis for Thickness, we find that the first solution has less variability. Step 6: Double-click the Optimal Solution Spreadsheet in the Project Explorer to view the predicted Thickness and Thickness Std. given. Conclusions From the pareto chart, we can see that effects B, D and CD are significant for thickness. Using the reduced model for the optimization, the optimum settings for factor B, D and C are: BCDPredicted ThicknessPredicted Thickness StdPosition 21210.7392High14.50.512Position 61214.8235High14.50.472By considering the expected variability for these two solutions, we find that the first solution is the best one. For more discussion on how to optimize both mean response and variability of response, please refer to Wu and Hamadas book, Experiments: Planning, Analysis, and Parameter Design, Optimization, John Wiley & Sons, New York, 2000.      HYPERLINK "http://www.reliasoft.com/Weibull/weibull7.htm"  Page  PAGE 11 of  NUMPAGES 11 2008 ReliaSoft Corporation. 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